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Studies on Structural, Optical and Electrical Properties of Spray Deposited Manganese Oxide (MnO2) Thin Films

Bhargande SK and Patil PS

Manganese Oxide thin films were prepared by pyrolytic decomposition of manganese acetate as a precursor solution onto the glass substrates. MnO2 thin films were deposited at three different temperatures namely 200, 250, 3000C. As deposited films were amorphous and porous having 200-300 nm thickness. The thin films were subsequently annealed at 5000C in the air for 2 hours. Structural, optical and electrical properties of MnO2 have been studied. Polycrystalline thin films with a cubic structure as evidenced from X-ray diffraction pattern. The electrical properties have been studied by means of electrical resistivity and thermo-electric (TEP) power measurements. The electrical resistivity studies were carried out using two-probe method. The TEP studies show that the films exhibits n-type conductivity. The optical absorption data were used to determine the (indirect ) band gap energy and is found to increase with increase in temperature