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Electrostatic Micro-actuator Structural Analysis Using Genetic Algorithm

Atal Anil Kumar

This study is devoted to providing predictions of the pull-in parameters (pull-in voltage and pull-in displacement) of electro-statically actuated micro-beams based on a continuous model using Genetic Algorithm (GA) technique. A phenomenon in which the actuated electrode comes in direct contact with the fixed electrode due to the electrostatic force is called pull-in instability. Accurate determination of pull-in parameters is vital in the design of electrostatic micro-actuators. The non-linear electrostatic beam equation is solved using GA and a comparative study is presented with the solutions obtained using COMSOL and Energy technique.