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Design of a Low Voltage RF MEMS Capacitive Switch with Low Spring Constant

Suparna Sarkar, Dr. A. Vimala Juliet

This paper reports on the design, testing of a low-actuation voltage Microelectromechanical systems (MEMS) switch for high-frequency applications. In the case of micromachined antennas, which involve low voltage signals, RF MEMS switches with low actuation voltage are required. The actuation voltage of RF MEMS switches mainly depends on the spring constant of the switch membrane. The mechanical design of low spring-constant foldedsuspension beams is presented first, and switches using these beams are demonstrated with measured low actuation voltage.