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Comparison of Sequential Light, Scanning Electron and Atomic Force Examine Methods for Electron Beam Lithography Generated Patterns

Sheng Zhang, Tao Li , Gangqiang Zhang and Yuzhen Feng

Super elliptical plates which are defined by shapes between an ellipse and a rectangle have a wide range of use in engineering applications. Investigations on non-linear behaviors of super elliptical isotropic plates are available in the literature, while investigations on nonlinear behaviors of FGM super elliptical plates haven’t been reported at present. In this paper, nonlinear bending and thermal post-buckling analysis are first presented for functionally graded super elliptical plates based on classical plate theory. Material properties are assumed to be temperature-dependent and graded in the thickness direction. The numerical illustrations concern the nonlinear behaviors of functional graded plates with immovable simply supported edge and immovable clamped edge. Influences played by different supported boundaries, thermal environmental conditions, and volume fraction index are discussed in detail using Ritz method